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US Patent D527751 Transfer-chamber

Patent D527751 was granted and assigned to Tokyo Electron on September, 2006 by the United States Patent and Trademark Office.

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Patent Citations Received
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US Patent 12080571 Substrate processing module and method of moving a workpiece
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US Patent D1029066 Mainframe of dual-robot substrate processing system
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Patent Inventor Names
Hiroki Oka0
Hiroshi Narushima0
Keisuke Kondoh0
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US Patent D992611 Mainframe of substrate processing system
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US Patent D991994 Mainframe of substrate processing system
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US Patent D0527751 Transfer-chamber US Patent D527751 Transfer-chamber

Infobox
Patent Number
D0527751
Patent Number
D527751
Edits on 20 May, 2023
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=D0527751
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=D0527751
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 US Patent D0527751 Transfer-chamber

Infobox
Is a
Patent
Patent
Current assignee
Tokyo Electron
Tokyo Electron
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
D0527751
Date of patent
September 5, 2006
Patent application number
29217729
Date Filed
November 22, 2004
Patent primary examiner
Antoine D. Davis
Antoine D. Davis

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