US Patent 9997333 Sub-pulsing during a state
Patent 9997333 was granted and assigned to Lam Research on June, 2018 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 5, 2017
Date of Patent
June 12, 2018
Patent Applicant
Patent Application Number
15726235
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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