US Patent 9997327 Liner tube and electron microscope

Patent 9997327 was granted and assigned to JEOL on June, 2018 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

JEOL

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

9997327

Date of Patent

June 12, 2018

Patent Application Number

15372536

Date Filed

December 8, 2016

Patent Primary Examiner

‌

Nicole Ippolito

Patent abstract

There is provided a liner tube capable of reducing the effects of magnetic field variations on an electron beam. The liner tube (10) is disposed inside the electron optical column (2) of an electron microscope (100). The interior of the tube (10) forms a path for the electron beam (EB). The liner tube (10) has a first cylindrical member (110) that is made of copper, gold, silver, or an alloy consisting principally of one of these metals.