Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Deborah J. Kirby0
David T. Chang0
Randall L. Kubena0
Date of Patent
June 5, 2018
0Patent Application Number
146809020
Date Filed
April 7, 2015
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A piezoelectric quartz shear-mode resonator includes plasma etched quartz tethers, each including a mount. The tethers are for mounting the resonator to a semiconductor substrate for the purpose of isolating the thermally-induced stress from the mounts from the active resonating region, wherein the quartz tethers have rounded corners.
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