US Patent 9957617 Deposition system for forming thin layer
Is a
Date Filed
February 22, 2016
0
Date of Patent
May 1, 2018
0
Patent Application Number
15049851
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Patent Inventor Names
Beom Seok Kim
0
Sunghwi Cho
0
Woocheol Jeong
0
Woosung Ha
0
Bongjin Kuh
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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