Patent 9937664 was granted and assigned to Nanoscribe GmbH on April, 2018 by the United States Patent and Trademark Office.
A method for producing a three-dimensional structure (10) in a lithographic material (24) that can be polymerized and thus solidified using energy input methods, wherein initially a shell wall (16) of the three-dimensional structure (10) to be produced is polymerized so as to form a polymerized shell wall (16) such that a volume (28) of unpolymerized lithographic material is enclosed using a first, spatially resolving energy input method, wherein the lithographic material (24) surrounding the polymerized shell wall (16) is removed in an intermediate development step, wherein subsequently the volume (28) enclosed by the shell wall (16) is polymerized using a second energy input method.