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US Patent 9865432 RF impedance matching network

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
0
Date Filed
February 9, 2015
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Date of Patent
January 9, 2018
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Patent Application Number
14616884
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Patent Citations Received
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US Patent 12132435 Method for repeatable stepper motor homing
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US Patent 12002611 High power low frequency coils
0
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US Patent 12027351 Plasma non-uniformity detection
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US Patent 11769651 High-frequency power supply device and output method of high-frequency power
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US Patent 11791134 Impedance adjustment device
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US Patent 11887820 Sector shunts for plasma-based wafer processing systems
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US Patent 11923175 Systems and methods for variable gain tuning of matching networks
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US Patent 11961711 Radio frequency match network and generator
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US Patent 11972928 Method and system for plasma processing arc suppression
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Patent Inventor Names
Imran Ahmed Bhutta
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
9865432
0
Patent Primary Examiner
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Lan Vinh
0

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