Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
December 12, 2017
Patent Application Number
12606340
Date Filed
October 27, 2009
Patent Citations Received
Patent Primary Examiner
Patent abstract
The driver circuit includes an inverter circuit having a first thin film transistor including a first oxide semiconductor film and a second transistor including a second oxide semiconductor film. The first thin film transistor and the second thin film transistor are enhancement transistors, in which a silicon oxide film including an OH group is provided on and in contact with the first oxide semiconductor film and the second oxide semiconductor film, and a silicon nitride film is provided on and in contact with the silicon oxide film.
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