Patent 9842757 was granted and assigned to Persimmon Technologies Corporation on December, 2017 by the United States Patent and Trademark Office.
A method including moving a substrate, located on a first end effector of a robot, from a first location towards a second location by the robot; determining location of a fiducial on the substrate while the substrate is being moved from the first location towards the second location; comparing the determined location of the fiducial with a reference fiducial location while the robot is moving the substrate from the first location towards the second location.