Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
November 21, 2017
Patent Application Number
14433972
Date Filed
October 4, 2013
Patent Citations Received
Patent Primary Examiner
Patent abstract
A detecting method includes irradiating a substrate having a concave and convex shape, with laser light collected by a lens; and detecting a height difference of the concave and convex shape by acquiring light intensity of reflected light and/or scattered light from the substrate as image data, and a light irradiation surface of the substrate is arranged at a position closer to the lens than a focal position of the lens is, reflected light and/or scattered light from the light irradiation surface is received as detected light, and a height difference of the substrate is detected based on a change in intensity of the received light.
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