Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
David Stern0
Melvin Yamamoto0
Chuan Gao0
Devin Nguyen0
Date of Patent
September 19, 2017
0Patent Application Number
127808250
Date Filed
May 14, 2010
0Patent Citations Received
Patent Primary Examiner
Patent abstract
In one embodiment of the invention, a method to image a probe array is described that includes focusing on a plurality of fiducials on a surface of an array. The method utilizes obtaining the best z position of the fiducials and using a surface fitting algorithm to produce a surface fit profile. One or more surface non-flatness parameters can be adjusted to improve the flatness image of the array surface to be imaged.
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