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US Patent 9719777 Interferometer with real-time fringe-free imaging

Patent 9719777 was granted and assigned to Zygo Corporation on August, 2017 by the United States Patent and Trademark Office.

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Is a
Patent
Patent

Patent attributes

Patent Applicant
Zygo Corporation
Zygo Corporation
Current Assignee
Zygo Corporation
Zygo Corporation
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
9719777
Date of Patent
August 1, 2017
Patent Application Number
14723803
Date Filed
May 28, 2015
Patent Citations Received
‌
US Patent 11914675 Image processing method, apparatus, computer device and storage medium
0
Patent Primary Examiner
‌
Hwa Lee
Patent abstract

Methods include: directing test light and reference light along different optical paths, where a test object is in a path of the test light; forming an image of the test object on a multi-element detector by directing test light from the test object to the detector; overlapping the reference light with the test light on the detector; detecting an intensity of the overlapped test and reference light with the detector, the intensity being detected at a frame rate; and modulating an optical path difference (OPD) between the test and reference light at the detector while detecting the light intensity. The OPD is modulated at a rate and amplitude sufficient to reduce a contrast of fringes in a spatial interference pattern formed by the light at the detector over a frame of the detector. Accordingly, fringe-free images may be acquired real-time.

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