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US Patent 9709903 Overlay target geometry for measuring multiple pitches

Patent 9709903 was granted and assigned to KLA-Tencor on July, 2017 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Current Assignee
KLA-Tencor
KLA-Tencor
Date Filed
April 13, 2012
Date of Patent
July 18, 2017
Patent Application Number
13446133
Patent Citations Received
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US Patent 11914290 Overlay measurement targets design
0
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US Patent 12019377 Target for measuring a parameter of a lithographic process
0
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US Patent 12021040 Overlay mark forming Moire pattern, overlay measurement method using same, and manufacturing method of semiconductor device using same
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
9709903
Patent Primary Examiner
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Tarifur Chowdhury

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