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US Patent 9627397 Memory device and method for fabricating the same

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Patent
Patent

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
9627397
Date of Patent
April 18, 2017
Patent Application Number
14803212
Date Filed
July 20, 2015
Patent Citations Received
‌
US Patent 11871567 Three-dimensional memory devices and fabricating methods thereof
3
Patent Primary Examiner
‌
William Harriston
Patent abstract

A memory device includes a semiconductor substrate, an isolation layer disposed on the semiconductor substrate, a first conductive layer disposed on the isolation layer, at least one contact plug passing through the isolation layer and electrically contacting the semiconductor substrate with the first conductive layer, a plurality of insulating layers disposed on the first conductive layer, a plurality of second conductive layers alternatively stacked with the insulating layers and insulated from the first conductive layer, a channel layer disposed on at least one sidewall of a first through opening and electrically contacting to the contact plug, wherein the first through opening passes through the insulating layers and the second conductive layers to expose the contact plug, and a memory layer disposed between the channel layer and the second conductive layers.

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