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US Patent 9530620 Dual control modes

Patent 9530620 was granted and assigned to Lam Research on December, 2016 by the United States Patent and Trademark Office.

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Patent abstractTimelineTable: Further ResourcesReferences
Is a
Patent
Patent
1

Patent attributes

Patent Applicant
Lam Research
Lam Research
1
Current Assignee
Lam Research
Lam Research
1
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
1
Patent Number
95306201
Patent Inventor Names
John C. Valcore, Jr.1
Date of Patent
December 27, 2016
1
Patent Application Number
141846541
Date Filed
February 19, 2014
1
Patent Citations Received
‌
US Patent 12125677 High-frequency power supply apparatus
2
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US Patent 11756768 High-frequency power supply system
‌
US Patent 12068132 Radio-frequency power supply apparatus
3
Patent Primary Examiner
Douglas W Owens
Douglas W Owens
1
Patent abstract

Systems and methods for using variables based on a state associated with a plasma system. A method includes determining whether the state associated with the plasma system is a first state or a second state and determining a first variable upon determining that the state is the first state. The first variable is determined based on a measurement at a communication medium. The method further includes determining a second variable upon determining that the state is the second state. The second variable is determined based on a measurement at the communication medium. The method includes determining whether the second variable exceeds a first threshold, providing an instruction to reduce power supplied to a plasma chamber upon determining that the second variable exceeds the first threshold, and providing an instruction to increase power supplied to the plasma chamber upon determining that the second variable is below the first threshold.

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