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US Patent 9484291 Robust pillar structure for semicondcutor device contacts

Patent 9484291 was granted and assigned to Amkor Technology on November, 2016 by the United States Patent and Trademark Office.

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Patent
Patent
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Patent attributes

Patent Applicant
Amkor Technology
Amkor Technology
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Current Assignee
Amkor Technology
Amkor Technology
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
94842910
Patent Inventor Names
Ahmer Syed0
Karthikeyan Dhandapani0
Sundeep Nand Nangalia0
Date of Patent
November 1, 2016
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Patent Application Number
139034680
Date Filed
May 28, 2013
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Patent Citations Received
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US Patent 11894829 Variation of metal layer stack under under bump metallization (UBM)
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US Patent 12009272 Integral redistribution layer for WCSP
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US Patent 11935855 Electronic package structure and method for manufacturing the same
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Patent Primary Examiner
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William Harriston
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Patent abstract

Methods and systems for a robust pillar structure for a semiconductor device contacts are disclosed, and may include processing a semiconductor wafer comprising one or more metal pads, wherein the processing may comprise: forming a second metal contact on the one or more metal pads; forming a pillar on the second metal contact, and forming a solder bump on the second metal contact and the pillar, wherein the pillar extends into the solder bump. The second metal contact may comprise a stepped mushroom shaped bump, a sloped mushroom shaped bump, a cylindrical post, and/or a redistribution layer. The semiconductor wafer may comprise silicon. A solder brace layer may be formed around the second metal contact. The second metal contact may be tapered down to a smaller area at the one or more metal pads on the semiconductor wafer. A seed layer may be formed between the second metal contact and the one or more metal pads on the semiconductor wafer. The pillar may comprise copper.

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