Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 13, 2016
Patent Application Number
14471210
Date Filed
August 28, 2014
Patent Citations Received
Patent Primary Examiner
Patent abstract
An film bulk acoustic wave resonator (FBAR) structure has an FBAR and a via disposed substantially directly beneath the FBAR. The via is in thermal contact with the FBAR. A plurality of vias may be included. The via(s) serve to dissipate heat generated by the FBAR structure during operation.
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