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US Patent 9427948 Manufacturing a flexible structure by transfers of layers

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Patent abstractTimelineTable: Further ResourcesReferences
Is a
Patent
Patent

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
9427948
Patent Inventor Names
Frederic Mazen1
Maxime Argoud1
Christophe Morales1
Frank Fournel1
Hubert Moriceau1
Date of Patent
August 30, 2016
Patent Application Number
13718037
Date Filed
December 18, 2012
Patent Citations Received
‌
US Patent 11791350 Peeling method and manufacturing method of flexible device
Patent Primary Examiner
‌
Sing P Chan
Patent abstract

A method for manufacturing a flexible structure including implanting ionic species in first and second source substrates so as to form first and second embrittlement regions respectively, delimiting first and second thin films, providing a flexible substrate, the stiffness R of which is less than or equal to 107 GPa·μm3, securing the first and second thin films to the first and second faces of the flexible substrate respectively so as to form a stack including the flexible structure delimited by the first and second embrittlement regions, the flexible structure having a stiffening effect suitable for allowing transfers of the first and second thin films, and applying a thermal budget so as to transfer the first and second thin films onto the flexible substrate.

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