US Patent 9407052 Amplifier, laser apparatus, and extreme ultraviolet light generation system
Patent 9407052 was granted and assigned to Gigaphoton Inc on August, 2016 by the United States Patent and Trademark Office.
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Patent abstract
An amplifier may include a plurality of discharge tubes arranged in a designed path of a seed laser beam and an optical system arranged to steer the seed laser beam to travel along the designed path.
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US Patent 09407052 Amplifier, laser apparatus, and extreme ultraviolet light generation system US Patent 9407052 Amplifier, laser apparatus, and extreme ultraviolet light generation system
Infobox
Patent Number
0940705200
Patent Number
940705200
Edits on 29 Apr, 2023
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Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
094070520
Date of Patent
August 2, 2016
0Patent Application Number
144557010
Date Filed
August 8, 2014
0Official Website
Patent Primary Examiner
Edits on 5 Oct, 2022
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Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
094070520
Date of Patent
August 2, 2016
0Patent Application Number
144557010
Date Filed
August 8, 2014
0Official Website
Patent Primary Examiner
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US Patent 09407052 Amplifier, laser apparatus, and extreme ultraviolet light generation system
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
09407052
Date of patent
August 2, 2016
Patent application number
14455701
Date Filed
August 8, 2014
Patent primary examiner
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