US Patent 9405205 Lithographic apparatus and in-line cleaning apparatus
Is a
Date Filed
May 18, 2015
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Date of Patent
August 2, 2016
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Patent Application Number
14714944
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Patent Inventor Names
Roelof Frederik De Graaf
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Bauke Jansen
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Hans Jansen
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Hubertus Leonardus Franciscus Heusschen
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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