Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Oden Warren0
Syed Amanula Syed Asif0
Yunje Oh0
Date of Patent
August 2, 2016
0Patent Application Number
136852540
Date Filed
November 26, 2012
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A microelectromechanical transducer and test system is disclosed. One embodiment includes a body, a probe moveable relative to the body, and a micromachined comb drive. The micromachined comb drive includes a plurality of sensing capacitors forming a differential capacitive displacement sensor, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe.
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