US Patent 9322631 Surface measurement instrument and calibration thereof

Patent 9322631 was granted and assigned to Taylor Hobson on April, 2016 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Taylor Hobson

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

9322631

Date of Patent

April 26, 2016

Patent Application Number

13581900

Date Filed

March 1, 2011

Patent Primary Examiner

‌

John H Le

Patent abstract

A method of calibrating a surface measurement instrument includes rotating a work piece having an undulating surface on a turntable of a metrological apparatus; measuring the surface of the work piece at a plurality of rotational positions; analyzing the results of the measurement to determine parameters describing an error causing characteristic of the metrological apparatus; and using the determined parameters to correct measurement data for the error causing characteristic of the metrological apparatus.