Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 1, 2016
Patent Application Number
14058054
Date Filed
October 18, 2013
Patent Citations Received
Patent Primary Examiner
Patent abstract
A polishing head for a chemical-mechanical polishing system includes a carrier head, at least one electromagnetism actuated pressure sector and a membrane. The electromagnetism actuated pressure sector is disposed on the carrier head. The membrane covers the electromagnetism actuated pressure sector.
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