Patent attributes
A method of determining a robot place location for a robot, the robot adapted to transport a substrate. The method comprises moving a calibration fixture past one or more edge sensors along a calibration path offset from and substantially parallel to a nominal transport path; determining robot locations when an edge of the calibration fixture changes a state of the one or more edge sensors; determining one or more sensor locations of the one or more edge sensors based on the robot locations; transporting the substrate along the nominal transport path past the one or more edge sensors to a target location; determining the robot place location based on the sensor locations; and placing the substrate at the target location with the robot located at the robot place location.
