Patent 9178032 was granted and assigned to Electronics and Telecommunications Research Institute on November, 2015 by the United States Patent and Trademark Office.
Provided is a gas sensor including a substrate, a sensing electrode extended in a first direction on the substrate, and a plurality of heaters disposed in a second direction crossing the first direction on the substrate. The plurality of heaters is separated at both sides of the sensing electrode. The plurality of heaters includes graphene.