Patent attributes
A nonvolatile semiconductor storage device has a plurality of memory strings in which electrically rewritable memory cells are connected in series. The memory strings have word-line electroconductive layers laminated at a prescribed interval to sandwich an interlayer insulating film onto a semiconductor substrate and through holes that penetrate through the word-line electroconductive layers and the interlayer insulating films. The gate insulating film is formed along an inner wall of the through holes and includes a charge-accumulating film. The columnar semiconductor layer is formed inside the through holes to sandwich the gate insulating film along with the word-line electroconductive layer. The columnar semiconductor layer contains carbon, oxygen, or nitrogen.
