US Patent 9171699 Impedance-based adjustment of power and frequency
Patent 9171699 was granted and assigned to Lam Research on October, 2015 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 1, 2012
Date of Patent
October 27, 2015
Patent Application Number
13666912
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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