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US Patent 9151940 Semiconductor inspection and metrology system using laser pulse multiplier

Patent 9151940 was granted and assigned to KLA-Tencor on October, 2015 by the United States Patent and Trademark Office.

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Is a
Patent
Patent
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Patent attributes

Patent Applicant
KLA-Tencor
KLA-Tencor
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Current Assignee
KLA-Tencor
KLA-Tencor
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
91519400
Date of Patent
October 6, 2015
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Patent Application Number
137115930
Date Filed
December 11, 2012
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Patent Citations Received
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US Patent 12061263 Systems and methods for a configurable sensor system
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US Patent 11885916 Systems and methods for improving detection of a return signal in a light ranging and detection system
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US Patent 11906670 Interference mitigation for light detection and ranging
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US Patent 11971507 Systems and methods for mitigating optical crosstalk in a light ranging and detection system
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US Patent 11698443 Multiple pulse, lidar based 3-D imaging
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US Patent 11703569 LIDAR data acquisition and control
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US Patent 11874377 Multiple pixel scanning LIDAR
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Patent Primary Examiner
Scott Walker
Scott Walker
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Patent abstract

A pulse multiplier includes a beam splitter and one or more mirrors. The beam splitter receives a series of input laser pulses and directs part of the energy of each pulse into a ring cavity. After circulating around the ring cavity, part of the pulse energy leaves the ring cavity through the beam splitter and part of the energy is recirculated. By selecting the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitter. This pulse multiplier can inexpensively reduce the peak power per pulse while increasing the number of pulses per second with minimal total power loss.

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