Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 15, 2015
Patent Application Number
13909892
Date Filed
June 4, 2013
Patent Citations Received
Patent Primary Examiner
Patent abstract
Micro pick up arrays for transferring micro devices from a carrier substrate are disclosed. In an embodiment, a micro pick up array includes a compliant contact for delivering an operating voltage from a voltage source to an array of electrostatic transfer heads. In an embodiment, the compliant contact is moveable relative to a base substrate of the micro pick up array.
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