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Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
July 21, 2015
0Patent Application Number
136422570
Date Filed
April 19, 2011
0Patent Primary Examiner
Patent abstract
Embodiments of the present invention provide a method of determining at least one characteristic of a target surface, comprising providing a phase map for a first region of a target surface via radiation having a first wavelength, providing n further phase maps for the first region via radiation having a further n wavelengths each different from the first wavelength, and determining at least one characteristic at the target surface responsive to the first and further phase maps.
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