US Patent 9059678 TCCT match circuit for plasma etch chambers
Patent 9059678 was granted and assigned to Lam Research on June, 2015 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 25, 2013
0
Date of Patent
June 16, 2015
0
Patent Applicant
Patent Application Number
13751001
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Patent Inventor Names
Alex Paterson
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Maolin Long
0
Ricky Marsh
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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