Patent attributes
Devices and methods are provided that utilize a first electrode disposed on a first substrate and a second electrode disposed on a second substrate, where the first electrode and the second electrode define at least part of a variable capacitance. A third substrate is arranged between the first substrate and the second substrate, the third substrate having an opening arranged such that at least a portion of the first electrode and the second electrode overlap the opening. A transmission element is provided that partially overlaps the opening. The transmission element is physically coupled to the second electrode such that a force biasing the transmission element causes the second electrode to deflect relative to the first electrode, thus changing the variable capacitance. A measurement of the variable capacitance may then be used to determine force information.
