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US Patent 9005353 Getter structure including a gas-permeable material description
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Patent
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Date Filed
June 22, 2012
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Date of Patent
April 14, 2015
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Patent Application Number
13530596
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Patent Citations Received
US Patent 11685645 Micro-electromechanical system and method for producing same
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Patent Inventor Names
Stéphane Caplet
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
9005353
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Patent Primary Examiner
Duane Smith
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