US Patent 8896809 Lithographic apparatus and device manufacturing method
Is a
Date Filed
August 15, 2007
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Date of Patent
November 25, 2014
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Patent Application Number
11889722
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Patent Citations Received
Patent Inventor Names
Judocus Marie Dominicus Stoeldraijer
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Diederik Jan Maas
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Erik Roelof Loopstra
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Jan Bernard Plechelmus Van Schoot
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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