US Patent 8826855 C-shaped confinement ring for a plasma processing chamber

Patent 8826855 was granted and assigned to Lam Research on September, 2014 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Lam Research

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

88268550

Patent Inventor Names

Alexei Marakhtanov0

Rajinder Dhindsa0

Michael C. Kellogg0

Date of Patent

September 9, 2014

Patent Application Number

128280650

Date Filed

June 30, 2010

Patent Citations Received

‌

US Patent 12027410 Edge ring arrangement with moveable edge rings

Patent Primary Examiner

‌

Maureen Gramaglia

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