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US Patent 8719759 Area optimized series gate layout structure for FINFET array

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Patent
Patent

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
8719759
Date of Patent
May 6, 2014
Patent Application Number
13778403
Date Filed
February 27, 2013
Patent Citations Received
‌
US Patent 11670586 Semiconductor device with source resistor and manufacturing method thereof
0
Patent Primary Examiner
‌
Phallaka Kik
Patent abstract

The present disclosure relates to a method of optimizing the area of series gate layout structures for FinFET devices. The method analyzes an integrated chip (IC) layout to determine a first gate material density along a first direction and to separately determine a second gate material density along a second direction based upon the first gate material density. A number of series gate stages for a FinFET (field effect transistor) device having a gate length along the second direction, is chosen based upon the second gate material density and one or more device performance parameters of the FinFET device. By analyzing the density of gate material in separate directions, the effective length of the gate of the FinFET can be increased without increasing the size of the transistor array.

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