US Patent 8696878 Wafer processing deposition shielding components
Patent 8696878 was granted and assigned to Applied Materials on April, 2014 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 26, 2012
Date of Patent
April 15, 2014
Patent Application Number
13457441
Patent Inventor Names
Keith A. Miller
0
Martin Lee Riker
0
Anantha Subramani
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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