Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shawn J. Cunningham0
Arthur S. Morris, III0
Dana R. DeReus0
Date of Patent
March 18, 2014
0Patent Application Number
136810450
Date Filed
November 19, 2012
0Patent Primary Examiner
Patent abstract
Methods and devices for fabricating tri-layer beams are provided. In particular, disclosed are methods and structures that can be used for fabricating multilayer structures through the deposition and patterning of at least an insulation layer, a first metal layer, a beam oxide layer, a second metal layer, and an insulation balance layer.
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