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US Patent 8654426 Optical scanning device

Patent 8654426 was granted and assigned to Mitsumi Electric on February, 2014 by the United States Patent and Trademark Office.

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Patent attributes

Current Assignee

Mitsumi Electric

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Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Patent Inventor Names

Tsukasa Yamada0

Date of Patent

February 18, 2014

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Patent Application Number

133307670

Date Filed

December 20, 2011

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Patent Citations Received

US Patent 12021431 Actuator device

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US Patent 11673794 Actuator device

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US Patent 11747611 Compact line scan mems time of flight system with actuated lens

US Patent 11757341 Actuator device

US Patent 11939211 Actuator device

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Patent Primary Examiner

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Patent abstract

An optical scanning device includes a mirror, a mirror supporting part to support the mirror on an upper surface, and a pair of torsion beams to support the mirror supporting part from both sides in an axis direction and to drive the mirror supporting part so as to swing the mirror supporting part around the axis by being twisted. The torsion beams include slits approximately parallel to the axis direction.

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