US Patent 8651789 Substrate processing apparatus
Patent 8651789 was granted and assigned to Brooks Automation on February, 2014 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 13, 2011
0
Date of Patent
February 18, 2014
0
Patent Application Number
13159034
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Patent Inventor Names
Robert T. Caveney
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Christopher Hofmeister
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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