Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mark Begbie0
Richard Ian Laming0
Date of Patent
February 4, 2014
0Patent Application Number
122935370
Date Filed
March 20, 2007
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A micro-electrical-mechanical device comprises: a transducer arrangement having at least a membrane being mounted with respect to a substrate; and electrical interface means for relating electrical signals to movement of the membrane; in which the transducer arrangement comprises stress alleviating formations which at least partially decouple the membrane from expansion or contraction of the substrate.
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