Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chien-Min Sung0
Date of Patent
January 7, 2014
0Patent Application Number
127267860
Date Filed
March 18, 2010
0Patent Citations Received
Patent Primary Examiner
Patent abstract
The present invention provides CMP pad dressers and methods for dressing or conditioning CMP pads. In one aspect, a method for conditioning a CMP pad can include cutting the CMP pad with superabrasive cutting elements and controlling a degree of contact between the CMP pad and the cutting elements using control elements. The degree of contact is established through placement of the control elements relative to the cutting elements.
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