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US Patent 8546748 Helium barrier atom chamber

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Patent
Patent

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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
8546748
Date of Patent
October 1, 2013
Patent Application Number
13441466
Date Filed
April 6, 2012
Patent Citations Received
‌
US Patent 11776797 Vacuum cell configured for reduced inner chamber helium permeation
‌
US Patent 11766651 Passively pumped, polycrystalline ceramic high and ultra-high vacuum chambers
Patent Primary Examiner
‌
David A. Vanore
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