US Patent 8509938 Substrate apparatus calibration and synchronization procedure
Patent 8509938 was granted and assigned to Brooks Automation on August, 2013 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 6, 2012
0
Date of Patent
August 13, 2013
0
Patent Application Number
13366968
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Patent Jurisdiction
Patent Number
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