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US Patent 8504194 Substrate processing apparatus and substrate transport method

Patent 8504194 was granted and assigned to Dainippon Screen Mfg Co on August, 2013 by the United States Patent and Trademark Office.

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Patent

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Current Assignee

Dainippon Screen Mfg Co

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

85041941

Date of Patent

August 6, 2013

Patent Application Number

127220631

Date Filed

March 11, 2010

Patent Citations Received

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US Patent 11754622 Thermal control system for an automated test system

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US Patent 12007411 Test socket having an automated lid

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US Patent 11953519 Modular automated test system

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US Patent 11754596 Test site configuration in an automated test system

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US Patent 11867749 Vision system for an automated test system

Patent Primary Examiner

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Yolanda Jones

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