US Patent 8481984 Extreme ultra violet light source apparatus
Patent 8481984 was granted and assigned to Gigaphoton Inc on July, 2013 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 11, 2009
Date of Patent
July 9, 2013
Patent Application Number
12482796
Patent Inventor Names
Osamu Wakabayashi
0
Masato Moriya
0
Tamotsu Abe
0
Takashi Suganuma
0
Akira Endo
0
Akira Sumitani
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
Find more entities like US Patent 8481984 Extreme ultra violet light source apparatus
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
By using this site, you agree to our Terms of Service.