Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tsz-Sin Siu0
Jeonghoon Oh0
Steven M. Zuniga0
Thomas B. Brezoczky0
Andrew J. Nagengast0
Hung Chih Chen0
Date of Patent
June 4, 2013
0Patent Application Number
116149400
Date Filed
December 21, 2006
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion.
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