US Patent 8416402 Method and apparatus for inspecting defects
Patent 8416402 was granted and assigned to Hitachi on April, 2013 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
May 30, 2012
0
Date of Patent
April 9, 2013
0
Patent Application Number
13483104
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Patent Citations Received
Patent Inventor Names
Yasuhiro Yoshitake
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Yukihiro Shibata
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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