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US Patent 8405414 Wafer testing systems and associated methods of use and manufacture

Patent 8405414 was granted and assigned to Advanced Inquiry Systems Inc. on March, 2013 by the United States Patent and Trademark Office.

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Patent
Patent
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Patent attributes

Current Assignee
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Advanced Inquiry Systems Inc.
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
84054140
Patent Inventor Names
Morgan T. Johnson0
Aaron Durbin0
David Keith0
Date of Patent
March 26, 2013
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Patent Application Number
132479810
Date Filed
September 28, 2011
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Patent Citations Received
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US Patent 11662366 Wafer probe with elastomer support
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US Patent 11675010 Compliant wafer probe assembly
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Patent Primary Examiner
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Jermele M Hollington
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Patent abstract

A wafer testing system and associated methods of use and manufacture are disclosed herein. In one embodiment, the wafer testing system includes an assembly for releaseably attaching a wafer to a wafer translator and the wafer translator to an interposer by means of separately operable vacuums, or pressure differentials. The assembly includes a wafer translator support ring coupled to the wafer translator, wherein a first flexible material extends from the wafer translator support ring so as to enclose the space between the wafer translator and the interposer so that the space may be evacuated by a first vacuum through one or more first evacuation paths. The assembly can further include a wafer support ring coupled to the wafer and the chuck, wherein a second flexible material extends from wafer support ring so as to enclose the space between the wafer and the wafer translator so that the space may be evacuated by a second vacuum through one or more second evacuation pathways.

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