Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yuya Sugiyama0
Date of Patent
March 26, 2013
0Patent Application Number
131708910
Date Filed
June 28, 2011
0Patent Citations Received
Patent Primary Examiner
Patent abstract
In forming a ferro-electric capacitor structure of an FeRAM, a lower electrode film is formed (step S1), a first ferro-electric film is formed (step S2), the first ferro-electric film is crystallized by a first heat treatment (step S3), a second ferro-electric film in an amorphous state is formed on the first ferro-electric film (step S4), an SRO film in an amorphous state is formed on the second ferro-electric film (step S5), a first upper electrode film is formed on the SRO film (step S6), and the second ferro-electric film and the SRO film are crystallized by a second heat treatment (step S7).
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